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Author:Victor Antonyuk

Publications
Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage
Maksym Bondarenko, Victor Antonyuk, Iuliia Bondarenko, Iryna Makarenko and Sergii Vysloukh
EasyChair Preprint 4970

Keyphrases

Accuracy, atomic force microscopy, Microhardness, Nanoelectronics, silicic probe.

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